E-Gun evaporator

Overview

The e-gun evaporator, also known as Egon, is a homegrown electron beam physical vapor deposition system.

Operating instructions

Unloading sample/Venting loadlock

Prerequisites:

1. Sample holder must be in the top position
2. The gate valve (GV) must be closed
3. The sample valve (SV) to the roughing pump must be closed

Then:

1. Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or or (over range)
2. Remove the sample holder

Loading sample/pumping down the loadlock

1. Mount the sample on the holder and secure the holder in the top position
2. Close the vent valve
3. Close the roughing pump valve (RV). A warning signal for close RV starts
4. Open the sample valve (SV). Watch the LL pressure on the gauge.
5. When the LL pressure is < 8×10^-2 torr, open RV again
6. When the LL pressure is < 5×10^-2 torr, close SV. Watch for a fast rise in the LL pressure! This is a sign of a leak.
7. Open GV before LL pressure rises to > 8×10^-2 torr
8. Gently lower the sample holder into the chamber

Deposition

1. Chamber pressure must be < 1×10^-6 torr before starting
2. Choose material on index wheel on the right side of the chamber
3. Turn on the power supply (PS); Push all breakers down from left to right