E-Gun evaporator

Overview

The e-gun evaporator, also known as Egon, is a homegrown electron beam physical vapor deposition system.

Operating instructions

Unloading sample/Venting loadlock

Prerequisites:

1. Sample holder must be in the top position
2. The gate valve (GV) must be closed
3. The sample valve (SV) to the roughing pump must be closed

Then:

1. Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or or (over range)
2. Remove the sample holder