Präzitherm hotplates
 | |
| Essentials | |
|---|---|
| Full name | Präzitherm PZ14SR |
| Manufacturer | Harry Gestigkeit GmbH |
| Description | Precision hotplate |
| Location | Cleanroom 1 (03.2.209A) Cleanroom 2 (03.2.203B) |
| Manual | Manual |
| Responsibility | |
| Primary | Nader |
Used to bake photo- and e-beam resist on substrates after spin coating.
Should be left at 115°C and 185°C.
Make sure there is no resist on the bottom of your chip before baking.