Resists

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Photoresists

  • AZ 1505
  • AZ 4500 series
  • AZ 5214 E
  • AZ nLOF 2000
  • MR ma-N 400 & 1400
  • AR-N 7520 NEW (high sensitivity)
  • AR-N 7520 ORIG. (low sensitivity)

Electron beam resists

  • PMMA
  • AR-P 6200 (CSAR 62)
  • ZEP 520A
  • MMA copolymer
  • SU-8
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