Diener plasma asher: Difference between revisions
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[https://youtu.be/BQeXidf6VcM Click here to watch video on YouTube] | [https://youtu.be/BQeXidf6VcM Click here to watch video on YouTube] | ||
=== Load your sample === | |||
# Open the door. | # Open the door. | ||
# Slide out the quartz plate. | # Slide out the quartz plate. | ||
| Line 26: | Line 26: | ||
# Close door. | # Close door. | ||
# Turn on pump using the green button labeled ''PUMP''. | # Turn on pump using the green button labeled ''PUMP''. | ||
=== Execute an ashing program === | |||
# On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time). | # On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time). | ||
# Press the green button | # Press the green button labeled ''START''. | ||
# Wait for the program to finish. | # Wait for the program to finish. | ||
#* When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber. | #* When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber. | ||
#* When the program is done the status squares will turn white on the screen. | #* When the program is done the status squares will turn white on the screen. | ||
=== Unload your sample === | |||
# Turn off the pump. | # Turn off the pump. | ||
# Open the door. | # Open the door. | ||
Revision as of 20:29, 7 April 2022
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
Usage rules
This tool is for semiconductors only. This means no daughterboards, beakers, tweezers, etc.
Make sure your samples are absolutely 100% dry before putting them in the asher.
Quick-start guide
Video on how to operate our Diener Plasma Asher:
Click here to watch video on YouTube
Load your sample
- Open the door.
- Slide out the quartz plate.
- Place your sample in the center.
- Slide the plate back in.
- Close door.
- Turn on pump using the green button labeled PUMP.
Execute an ashing program
- On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time).
- Press the green button labeled START.
- Wait for the program to finish.
- When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber.
- When the program is done the status squares will turn white on the screen.
Unload your sample
- Turn off the pump.
- Open the door.
- Slide out the plate.
- Remove your sample.
- Close the door.
- Fill in the log book beside the tool.
- Done!