Diener plasma asher: Difference between revisions
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== Usage rules == | |||
This tool is for semiconductors '''only'''. | |||
This means no daughterboards, beakers, tweezers, etc. | |||
Make sure your samples are absolutely 100% dry before putting them in the asher. | |||
== Quick-start guide == | |||
Video on how to operate our Diener Plasma Asher: | Video on how to operate our Diener Plasma Asher: | ||
[[File:Diener asher.mp4|500px]] | [[File:Diener asher.mp4|500px]] | ||
[https://youtu.be/BQeXidf6VcM Click here to watch video on YouTube] | [https://youtu.be/BQeXidf6VcM Click here to watch video on YouTube] | ||
# Open the door. | |||
# Slide out the quartz plate. | |||
# Place your sample in the center. | |||
# Slide the plate back in. | |||
# Close door. | |||
# Turn on pump using the green button labeled ''PUMP''. | |||
# On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time). | |||
# Press the green button labaled ''START''. | |||
# Wait for the program to finish. | |||
#* When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber. | |||
#* When the program is done the status squares will turn white on the screen. | |||
# Turn off the pump. | |||
# Open the door. | |||
# Slide out the plate. | |||
# Remove your sample. | |||
# Close the door. | |||
# Fill in the log book beside the tool. | |||
# Done! | |||
Revision as of 20:24, 7 April 2022
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
Usage rules
This tool is for semiconductors only. This means no daughterboards, beakers, tweezers, etc.
Make sure your samples are absolutely 100% dry before putting them in the asher.
Quick-start guide
Video on how to operate our Diener Plasma Asher:
Click here to watch video on YouTube
- Open the door.
- Slide out the quartz plate.
- Place your sample in the center.
- Slide the plate back in.
- Close door.
- Turn on pump using the green button labeled PUMP.
- On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time).
- Press the green button labaled START.
- Wait for the program to finish.
- When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber.
- When the program is done the status squares will turn white on the screen.
- Turn off the pump.
- Open the door.
- Slide out the plate.
- Remove your sample.
- Close the door.
- Fill in the log book beside the tool.
- Done!