Resists

Stocked resists

Photoresists

• AZ 1505 (technical data sheet)
• AZ 4500 series (data sheet)
• AZ 5214 E (data sheet)
• AZ nLOF 2000 (data sheet)
• MR ma-N 400 & 1400 (data sheet)
• AR-N 7520 NEW (high sensitivity) (data sheet)
• AR-N 7520 ORIG. (low sensitivity)
• SU-8 (data sheet)

Electron beam resists

• PMMA A-series (data sheet)
• AR-P 6200 (CSAR) (data sheet)
• ZEP 520A
• MMA copolymer EL-series (data sheet, page on the internal QDev wiki)

What's in a name?

Some vendor names are straightforward, like PMMA 950K A4.

PMMA: polymethylmethacrylate

950K: molecular weight in thousands

A4: solvent and solids wt%, in this case anisole 4%

NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).

Some vendor names are very vendor specific, like AR-P 672.045.

AR: vendor AllResist

P: positive resist

672: product series, in this case PMMA 950K in anisole

045: 4.5% solids in wt%

Purchasing

micro resist

MicroChem was bought by Kayaku. micro resist is the European distributor.

Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.

Always ask for expiration date of the batch you're ordering, might be as short as 3 months.

Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).

Sales sales@microresist.de

Peggy Frank p.frank@microresist.de

PMMA A-series: PMMA 950K AX

Copolymer EL-series: MMA MAA ELX

Negative resist: ma-N 2403

AllResist

Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.

Only source for CSAR.

Sales order@allresist.de

Price list

PMMA 950K in anisole: AR-P 672.XXX

CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)

Negative resist: AR-N 7520.XX

Zeon

ZEP 520A

Ancillaries

AllResist

PMMA developer: AR 600-56

Adhesion promoter: AR 300-80 (info on internal QDev wiki)

micro resist

ma-N developer: ma-D 525