Elionix 7000

Elionix 7000

Essentials
Full name	Elionix EBL system
Manufacturer	ELIONIX INC.
Description	Electron beam lithography system
Location	03.2.TBD
Manual	TBD
Responsibility
Primary	Shiv
Secondary	-

Booking rules (last update: 11th Nov, 2014)

• Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
• You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc
• You may book only 3 hours on the system at a time (See the after hours exception)
• This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.
• After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly. However, if I see unfair usage of the tool in this period, I will intervene.

Only one booking allowed at a time between 9am-6pm on weekdays, no regulations outside of these hours. Last updated: 15 Apr 2014.

Manuals and Guides

Local Qdev versions - cheat sheet & detailed guide

• Cheat sheet

• QDev Elionix manual — written before the upgrade (linux->windows GUI), last updated 2013-03-05. Source repository here, upload new pdf versions to File:ElionixQDevManual.pdf.
• Manual from Jimmy and Hugh — pertains to Harvard system, last updated 4/9/09.

Design PC

This is the PC in the Elionix room in the basement, next to the two racks with elionix hardware. You may use this PC to ready your design, convert to *.cell & *.con formats. The desktop has all the shortcuts to network folders (Design computers on the 4th floor, shared images from SEM PC and user folder from Exposure PC) and relevant software. Any files outsides the designated user folders (shortcut on desktop) can be deleted without warning.

The PC is labeled Elionix.