Elionix 7000: Difference between revisions

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*After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly. However, if I see unfair usage of the tool in this period, I will intervene.
*After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly. However, if I see unfair usage of the tool in this period, I will intervene.
<del>Only one booking allowed at a time between 9am-6pm on weekdays, no regulations outside of these hours. Last updated: 15 Apr 2014.</del>
<del>Only one booking allowed at a time between 9am-6pm on weekdays, no regulations outside of these hours. Last updated: 15 Apr 2014.</del>
= Elionix update log: =
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'''4th June, 2014''': Semi-annual maintenance visit - new aperture set. User defined beam conditions are far from optimum. The engineer has reconditioned the ones stored under the '''Default''' user account. Use those as a starting point and save under your own user account.
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# No obvious cause for the occasional stage drift was found. The system continues to meet the <20 nm stitching and overlay accuracy specs.
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'''14th Apr, 2014''': SEM software update, WECAS gui update, exposure firmware update
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# SEM software update. Seems like a minor update b.01 to b.02.
# WECAS has shiny new icons. Basic workflow remains the same.
# Search position repeatibility now set to a default value of 1 nm
# Brightness automatically set to 200 during auto field correct procedures
# New pop up menu during manual and auto registration which displays the current state in the reg2 procedure
# Auto registration needs the search position repeatibility to be set to 30 nm otherwise it will get stuck in a loop trying to get the number down to 1 nm
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'''4th Dec, 2013''': Filament change, aperture change, new field correction markers, SEM software update
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#You can now choose 960 000 dots for any given write field. The minimum dwell time remains  fixed at 0.06 us.
#We have a new set of markers for field correction. Only I change the markers periodically. If you have trouble with field correction (>5 attempts):
##Is your brightness ~200 (or more)?
##Have you waited atleast 20 mins after conditioning the beam? Column drift, especially after a large change in current will lead to failed field correction
## Sometimes field correction converges in 1-2 attempts before starting the exposure, but the FC between two registrations does not converge (or takes more than 5-6 attempts). This problem arises if the chip fixed at an angle larger than +-3 deg. Be aware that the brace itself could be screwed down at an angle, thereby messing up your chip orientation.
##If you have followed the above guidelines and still have a problem, there is a chance the marker has been contaminated and need to pick a new marker. Call me (Shiv +45 2128 9025) and I'll guide you to pick a new marker OR change it yourself BUT let me know so I can mark the previous marker as used. It is important to keep track of used markers.
#There is a new 'auto focus and stigmation' button. The algorithm is rough around the edges and only works at the reference position with circular gold features. Choose your magnification well. Too high and magnification and the resulting contamination will interfere with the auto focusing.  At the end of the day, you'll probably still need to fine tune it manually.
#Registration: Manu. H. and Auto H. have been replaced with just Manual and Auto. Manual is the same as Manu. H., however Auto keeps trying until the tolerance is less than specified value. For Auto registration, use a search position repeatibility of 30 nm.
#The engineers have replaced the filament and the apertures in the system. They have readjusted the beam condition settings for the account 'Default'. Use those values as a starting point and save them to your designated account. The older conditions in your accounts will be far from the optimum.
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= Manuals and Guides =
= Manuals and Guides =

Revision as of 15:14, 1 October 2018

Elionix 7000
Picture of Elionix 7000 text
Essentials
Full nameElionix EBL system
ManufacturerELIONIX INC.
DescriptionElectron beam lithography system
Location03.2.TBD
ManualTBD
Responsibility
PrimaryShiv
SecondaryPétur

Booking rules (last update: 11th Nov, 2014)

  • Between the hours of 9 am and 6 pm weekdays, every user is allotted a bank of 3 hours of bookable time.
  • You may distribute these 3 hours across several slots - three 1 hour slots or two 1.5 hour slots, etc
  • You may book only 3 hours on the system at a time (See the after hours exception)
  • This rolling bank system also means that once you use, say 1 hour of your allotted 3 hours, you can make a new 1 hour booking sometime later.
  • After hours exception: 9am-6pm weekdays are the normal hours and reservation outside these hours (after hours) are not governed strictly. However, if I see unfair usage of the tool in this period, I will intervene.

Only one booking allowed at a time between 9am-6pm on weekdays, no regulations outside of these hours. Last updated: 15 Apr 2014.

Manuals and Guides

Local Qdev versions - cheat sheet & detailed guide

Official

Design PC

This is the PC in the Elionix room in the basement, next to the two racks with elionix hardware. You may use this PC to ready your design, convert to *.cell & *.con formats. The desktop has all the shortcuts to network folders (Design computers on the 4th floor, shared images from SEM PC and user folder from Exposure PC) and relevant software. Any files outsides the designated user folders (shortcut on desktop) can be deleted without warning. The login credentials are:

Username: Nanouser
Password:

The PC is labeled Elionix.

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