Doses: Difference between revisions
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m →100 kV |
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| Line 159: | Line 159: | ||
==Si== | ==Si== | ||
Optimal contrast | Optimal contrast | ||
Revision as of 14:11, 22 June 2018
| Si | InAsUC | InPUC | GaAsUC | SiGe | |
| A2 | 1000 | 700 | ? | ? | ? |
| A4 | 1000 | 700 | ? | 630 | ? |
| A6 | 1200 | ? | ? | 760 | ? |
| El6 | ? | ? | ? | ? | ? |
| El9 | ? | ? | ? | 420 | ? |
| CSAR4 | 430 | ? | ? | ? | ? |
| CSAR9 | ? | ? | ? | ? | ? |
| CSAR13 | 450 | ? | ? | 350 | ? |
| Si | InAsUC | InPUC | GaAsUC | SiGe | |
| A2 | 900 | ? | 500 | ? | ? |
| A4 | 900 | ? | 500 | 630 | ? |
| A6 | 1000 | ? | ? | 670 | ? |
| El6 | ? | ? | ? | ? | ? |
| El9 | ? | ? | ? | ? | ? |
| CSAR4 | 400 | ? | ? | ? | ? |
| CSAR9 | ? | ? | ? | ? | ? |
| CSAR13 | ? | ? | ? | ? | ? |
125 kV
GaAs
Uniform clearing
InP
Uniform clearing
InAs
Uniform clearing
Si
Optimal contrast
100 kV
GaAs
Uniform clearing
InP
Uniform clearing
InAs
Uniform clearing
Si
Optimal contrast