Doses: Difference between revisions
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=GaAs= | =GaAs= | ||
A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA | A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA | ||
=InP= | =InP= | ||
| Line 7: | Line 8: | ||
=Si= | =Si= | ||
CSAR 9: 430 uC/cm2 optimal contrast | CSAR 9: 430 uC/cm2 optimal contrast | ||
A4: 1000 uC/cm2 | A4: 1000 uC/cm2 | ||
A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested) | A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested) | ||
Revision as of 11:46, 1 May 2018
125 kV
GaAs
A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA
InP
InAs
Si
CSAR 9: 430 uC/cm2 optimal contrast
A4: 1000 uC/cm2
A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested)