Resists: Difference between revisions
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* AZ nLOF 2000 | * AZ nLOF 2000 | ||
* MRT ma-N 400 & 1400 | * MRT ma-N 400 & 1400 | ||
* AR-N 7520.011 new | |||
== Electron beam resists == | == Electron beam resists == | ||
Revision as of 10:24, 12 December 2017
Photoresists
- AZ 1505
- AZ 4500 series
- AZ 5214 E
- AZ nLOF 2000
- MRT ma-N 400 & 1400
- AR-N 7520.011 new
Electron beam resists
- AR-P 6200 (CSAR 62)
- ZEP 520A
- PMMA
- MMA copolymer
- SU-8