Cambridge ALD: Difference between revisions
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|toolfullname = | |toolfullname = | ||
|website = http://www.cambridgenanotechald.com/ | |website = http://www.cambridgenanotechald.com/ | ||
|company = Cambridge | |company = Cambridge NanoTech Inc | ||
|description = | |description = Atomic layer deposition system | ||
|location = | |location = Cleanrooms 1 & 2 | ||
|primary = | |primary = Shiv | ||
|secondary = | |secondary = Pétur | ||
|limits = TBD | |limits = TBD | ||
|computer = TBD | |computer = TBD | ||
|manual = TBD | |manual = TBD | ||
}} | }} | ||
Revision as of 14:46, 5 December 2016
 | |
| Essentials | |
|---|---|
| Full name | |
| Manufacturer | Cambridge NanoTech Inc |
| Description | Atomic layer deposition system |
| Location | Cleanrooms 1 & 2 |
| Manual | TBD |
| Responsibility | |
| Primary | Shiv |
| Secondary | Pétur |