Raith eLine: Difference between revisions
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= eLine usage and reservation guidelines = | = eLine usage and reservation guidelines = | ||
* To book time on the machine go to [http:// | * To book time on the machine go to [http://cleanroom.brickhost.com/Web/schedule.php]. You should sign in in the booking system, even if the machine is available and not booked by others. | ||
* Late cancellations of sessions that you’ve signed up should only happen when unforeseen conflicts or unexpected fab difficulties occur. Please do not sign up to use equipment unless you are prepared and have every intention of using the time. | * Late cancellations of sessions that you’ve signed up should only happen when unforeseen conflicts or unexpected fab difficulties occur. Please do not sign up to use equipment unless you are prepared and have every intention of using the time. | ||
<blockquote style="background-color: #F0F0F0; border: dashed thin grey;"> | <blockquote style="background-color: #F0F0F0; border: dashed thin grey;"> | ||
Revision as of 21:29, 1 December 2016
eLine usage and reservation guidelines
- To book time on the machine go to [1]. You should sign in in the booking system, even if the machine is available and not booked by others.
- Late cancellations of sessions that you’ve signed up should only happen when unforeseen conflicts or unexpected fab difficulties occur. Please do not sign up to use equipment unless you are prepared and have every intention of using the time.
If you don't have an account write to Shiv and he will provide you with username and password.
- Use the dedicated SEM (JEOL) for microscopy, unless the e_Line is really needed. Ask for SEM training if needed.
- Between the hours of 9 am and 6 pm on weekdays, you should:
- not reserve more than 3 hours. See (*)
- not book a 2nd slot, before the 1st one is done. See (*)
- delete booking only before the starting time.
- write to the experiment mailing list that the machine is free, if you finish earlier.
(*) Some NW wafer exposures take longer and exceptions to these rules are made to accomodate these tasks. A special account NW-MBE is used in the booking system to indicate these jobs.
- Please talk to a staff member if you have fab jobs that are not compatible with the rules above
Other
On the Marcus Lab website, under "documents," there is Jeff's fairly comprehensive guide to the Raith. Also, see Susan's Nanotube recipe for more helpful hints and tricks with the Raith. However, you may find yourself wanting more information about this instrument: what exactly is a writefield? why should I expect stitching errors?
Here are a few potentially-helpful websites:
http://nanodevices.nl/facilities/equipment/123-raith-e-line-ebl
http://www.nanophys.kth.se/nanophys/facilities/nfl/manual/wfalign/align.html
Some other useful considerations:
- If you make a feature with width=w, do not evaporate metal of thickness > 1.5*w (ish). The feature will topple over like a card standing on its side!
- The dose for a thin feature can be as much as 50% larger than a thicker feature because it does not benefit from the proximity effect.