Resists: Difference between revisions

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== Photoresists ==
== Photoresists ==


* AZ 1505
* [[AZ 1505]]
* AZ 4500 series
* AZ 4500 series
* AZ 5214 E
* AZ 5214 E

Revision as of 11:38, 22 August 2016

Photoresists

  • AZ 1505
  • AZ 4500 series
  • AZ 5214 E
  • AZ nLOF 2000
  • MRT ma-N 400 & 1400

Electron beam resists

  • AR-P 6200 (CSAR 62)
  • ZEP 520A
  • PMMA
  • MMA copolymer
  • SU-8