Resists: Difference between revisions
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| Line 10: | Line 10: | ||
* AR-P 6200 (CSAR 62) | * AR-P 6200 (CSAR 62) | ||
* ZEP 520A | |||
* PMMA | * PMMA | ||
* | * MMA copolymer | ||
* SU-8 | |||
Revision as of 12:27, 21 August 2016
Photoresists
- AZ 1505
- AZ 4500 series
- AZ 5214 E
- AZ nLOF 2000
- MRT ma-N 400 & 1400
Electron beam resists
- AR-P 6200 (CSAR 62)
- ZEP 520A
- PMMA
- MMA copolymer
- SU-8