Resists: Difference between revisions
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== Electron beam resists == | == Electron beam resists == | ||
* AR-P 6200 (CSAR 62) | |||
* PMMA | |||
* ZEP 520A | |||
Revision as of 12:25, 21 August 2016
Photoresists
- AZ 1505
- AZ 4500 series
- AZ 5214 E
- AZ nLOF 2000
- MRT ma-N 400 & 1400
Electron beam resists
- AR-P 6200 (CSAR 62)
- PMMA
- ZEP 520A