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* JEOL JSM 6320F
* JEOL JSM 6320F
* JEOL JSM 7800F
* [[JEOL 7800F|JEOL JSM 7800F]]
* e-Line SEM
* e-Line SEM
* TEM
* TEM

Revision as of 22:45, 14 February 2016

Lithography Thin film processing Characterization Other
  • e-Line Litho
  • Elionix
  • Raith eLine
  • Heidelberg µUPG 501
  • Süss mask aligner
  • AJA systems
  • E-Gun evaporator
  • Spinners
  • ALD 1
  • ALD 2
  • DC sputter
  • MBE
  • JEOL JSM 6320F
  • JEOL JSM 7800F
  • e-Line SEM
  • TEM
  • Alphastep
  • Optical profiler
  • Optical microscopes
  • AFM
  • Scriber Süss
  • Scriber Loomis
  • RTP
  • Biorad oven
  • µ-wave plasma oven
  • Denier RF-asher
  • K&S Ball Bonder
  • Edwards evaporator