Tergeo plasma asher: Difference between revisions

Tergeo plasma asher
Essentials
Full name	Tergeo Plasma Cleaner
Manufacturer	PIE Scientific
Description	Plasma cleaning/etching system
Location	Cleanroom 2
Responsibility
Primary	Nader
Secondary	Martin

Revision as of 20:37, 7 April 2022

Video on how to operate the Tergeo Plasma Asher:

Turn the lid counter-clockwise to remove it. Place it outside-up on a cleanroom wipe.
Slide out quartz plate.
Put your sample in the center between the marks.
Slide the plate in and align it to the quartz cylinder.
Put the lid back.
- Align the pins horizontally and rotate clockwise.

On the touchscreen, using the stylus, press Recipes.
Choose a desired plasma time.
Load Recipe
Run Recipe
Wait for recipe to complete and the system to indicate that the chamber has been vented.

Remove the lid and place it on a cleanroom wipe.
Slide out plate.
Remove your sample.
Slide the plate in.
Put the lid back.
Check on the screen that the pump is off (grey).
- If it is on (red), press to turn off.
Done!

@@ Line 9: / Line 9: @@
 |secondary = Martin
 }}
+== Quick-start guide ==
 Video on how to operate the Tergeo Plasma Asher:
 [[File:Tergeo.mp4|500px]]
 [https://www.youtube.com/watch?v=JTVdxPG7yQ4 Click here to watch the video on YouTube]
+=== Load your sample ===
+# Turn the lid counter-clockwise to remove it. Place it outside-up on a cleanroom wipe.
+# Slide out quartz plate.
+# Put your sample in the center between the marks.
+# Slide the plate in and align it to the quartz cylinder.
+# Put the lid back.
+#* Align the pins horizontally and rotate clockwise.
+=== Execute a cleaning recipe ===
+# On the touchscreen, using the stylus, press <code>Recipes</code>.
+# Choose a desired plasma time.
+# <code>Load Recipe</code>
+# <code>Run Recipe</code>
+# Wait for recipe to complete and the system to indicate that the chamber has been vented.
+=== Unload your sample ===
+# Remove the lid and place it on a cleanroom wipe.
+# Slide out plate.
+# Remove your sample.
+# Slide the plate in.
+# Put the lid back.
+# Check on the screen that the pump is off (grey).
+#* If it is on (red), press to turn off.
+# Done!