Resists: Difference between revisions
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== Photoresists == | == Stocked resists == | ||
=== Photoresists === | |||
* [[AZ 1505]] ([https://www.microchemicals.com/micro/tds_az_1500_series.pdf technical data sheet]) | * [[AZ 1505]] ([https://www.microchemicals.com/micro/tds_az_1500_series.pdf technical data sheet]) | ||
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* SU-8 ([https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf data sheet]) | * SU-8 ([https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf data sheet]) | ||
== Electron beam resists == | === Electron beam resists === | ||
* PMMA A-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | * PMMA A-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | ||
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* ZEP 520A | * ZEP 520A | ||
* MMA copolymer EL-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | * MMA copolymer EL-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | ||
== What's in a name? == | |||
Some vendor names are straightforward, like PMMA 950K A4. | |||
PMMA: polymethylmethacrylate | |||
950K: molecular weight in thousands | |||
A4: solvent and solids wt%, in this case anisole 4% | |||
NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%). | |||
Some vendor names are very vendor specific, like AR-P 672.045. | |||
AR: vendor AllResist | |||
P: positive resist | |||
672: product series, in this case PMMA 950K in anisole | |||
045: 4.5% solids in wt% | |||
== Purchasing == | |||
=== micro resist === | |||
MicroChem was bought by Kayaku. micro resist is the European distributor. | |||
Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive. | |||
Always ask for expiration date of the batch you're ordering, might be as short as 3 months. | |||
Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate). | |||
Sales [mailto:sales@microresist.de sales@microresist.de] | |||
Peggy Frank [mailto:p.frank@microresist.de p.frank@microresist.de] | |||
PMMA A-series: PMMA 950K AX | |||
Copolymer EL-series: MMA MAA ELX | |||
Negative resist: ma-N 2403 | |||
=== AllResist === | |||
Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life. | |||
Only source for CSAR. | |||
Sales [mailto:order@allresist.de order@allresist.de] | |||
[[Media:AR-Price-list-2020-eng.pdf|Price list]] | |||
PMMA 950K in anisole: AR-P 672.XXX | |||
CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole) | |||
Negative resist: AR-N 7520.XX | |||
=== Zeon === | |||
ZEP 520A | |||
== Ancillaries == | |||
=== AllResist === | |||
PMMA developer: AR 600-56 | |||
Adhesion promoter: AR 300-80 | |||
=== micro resist === | |||
ma-N developer: ma-D 525 | |||
Revision as of 12:19, 16 March 2022
Stocked resists
Photoresists
- AZ 1505 (technical data sheet)
- AZ 4500 series (data sheet)
- AZ 5214 E (data sheet)
- AZ nLOF 2000 (data sheet)
- MR ma-N 400 & 1400 (data sheet)
- AR-N 7520 NEW (high sensitivity) (data sheet)
- AR-N 7520 ORIG. (low sensitivity)
- SU-8 (data sheet)
Electron beam resists
- PMMA A-series (data sheet)
- AR-P 6200 (CSAR) (data sheet)
- ZEP 520A
- MMA copolymer EL-series (data sheet)
What's in a name?
Some vendor names are straightforward, like PMMA 950K A4.
PMMA: polymethylmethacrylate
950K: molecular weight in thousands
A4: solvent and solids wt%, in this case anisole 4%
NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).
Some vendor names are very vendor specific, like AR-P 672.045.
AR: vendor AllResist
P: positive resist
672: product series, in this case PMMA 950K in anisole
045: 4.5% solids in wt%
Purchasing
micro resist
MicroChem was bought by Kayaku. micro resist is the European distributor.
Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.
Always ask for expiration date of the batch you're ordering, might be as short as 3 months.
Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).
Sales sales@microresist.de
Peggy Frank p.frank@microresist.de
PMMA A-series: PMMA 950K AX
Copolymer EL-series: MMA MAA ELX
Negative resist: ma-N 2403
AllResist
Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.
Only source for CSAR.
Sales order@allresist.de
PMMA 950K in anisole: AR-P 672.XXX
CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)
Negative resist: AR-N 7520.XX
Zeon
ZEP 520A
Ancillaries
AllResist
PMMA developer: AR 600-56
Adhesion promoter: AR 300-80
micro resist
ma-N developer: ma-D 525