Cambridge ALD: Difference between revisions
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fixed HfOx precursor, precursor images, references are now through DOI, updated infobox |
added SOP, Technical notes, Troubleshooting |
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| Aluminum oxide (AlOx, Al<sub>2</sub>O<sub>3</sub>) || <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TMA <div class="mw-collapsible-content">trimethylaluminum <br/> (CH<sub>3</sub>)<sub>3</sub>Al <br/> [[File:TMA.png|290px]]</div></div> || style="background-color: #c6e0b4" | Yes || style="background-color: #ff9f9f" | No || [https://doi.org/10.1134/1.1626763] | | Aluminum oxide (AlOx, Al<sub>2</sub>O<sub>3</sub>) || <div class="toccolours mw-collapsible mw-collapsed" style="width:300px> TMA <div class="mw-collapsible-content">trimethylaluminum <br/> (CH<sub>3</sub>)<sub>3</sub>Al <br/> [[File:TMA.png|290px]]</div></div> || style="background-color: #c6e0b4" | Yes || style="background-color: #ff9f9f" | No || [https://doi.org/10.1134/1.1626763] | ||
|} | |} | ||
== Standard operating procedure == | |||
* Check nitrogen bottle pressure. Main bottle pressure should be at least 5 bar, line pressure roughly 1 bar. | |||
*: If line pressure is outside of 1-2 bar range, carefully adjust the regulator valve. | |||
* Make sure the valve on top of the nitrogen bottle is closed. | |||
* Make sure the valves of '''all''' precursors inside the ALD machine are closed. | |||
* ''ALD1 only'': run recipe ''Default_cleaning'' to pump out any residual gas in the gas lines. | |||
* Open valve on top of the nitrogen bottle. | |||
*: With flow set to 0 the actual flow can be between 0-1 sccm. | |||
* Press the big round ''VENT'' button. | |||
* Open the metal lid. | |||
* Put your sample inside, roughly in the center, away from the gas inlet and outlet. | |||
*: Check whether the rubber O-ring is properly seated. | |||
* Close the metal lid. | |||
* Press the big round ''PUMP'' button. | |||
*: Pressure with flow set to 0: ~5e-2 Torr or lower. | |||
* Place the metal cage on top of the tool. | |||
* Open relevant precursor valves. | |||
* Run your recipe. | |||
*: Pressure with flow present: low e-1 Torr. | |||
*: Pulse pressure: in the order of 1e0 Torr. Both precursors should show similar pulse peak pressure. | |||
*: ALD1 pulse lengths: H<sub>2</sub>O ~0.5 s, HfOx TDMAH 0.2 s, AlOx TMA 0.02 s. | |||
*: ALD2 pulse lengths: H<sub>2</sub>O ~0.02 s, HfOx TDMAH 0.2-0.5 s. | |||
* Close precursor valves. | |||
* Press the big round ''VENT'' button. | |||
* Place the metal cage on the side of the tool. | |||
* Take out your sample. Check the rubber o-ring. | |||
* Press the big round ''PUMP'' button. | |||
* Close the nitrogen bottle valve. | |||
* Run recipe ''Default_heater_set''. | |||
== Technical notes == | |||
* Recipe file location | |||
*: ''ALD1'': ''C:\Savannah\Users\Standard\'' | |||
*: ''ALD2'': ''C:\Cambridge Nanotech\Recipes\Standard\'' | |||
* Log file location | |||
*: ''ALD1'': ''C:\ALD data''. Includes pressure data, screenshot at termination. | |||
*: ''ALD2'': ''C:\Cambridge Nanotech\Logfile\''. Includes pressure and heater temperature data, screenshot at termination, software event logs. | |||
== Troubleshooting == | |||
* Pressure reading obviously wrong (above 1e3 Torr or below 1e-4 Torr): | |||
** Pressure gauge failure. Unplug the network cable from the small square pressure gauge beneath the chamber and plug it back in. The pressure reading should return to expected values. | |||
* No peak visible during precursor pulse: | |||
** Precursor valves closed. Make sure the relevant precursor valves are open. Consult the labels on the inside of the door. | |||
** Pulse time too short. Select the lowest plotting interval and check whether you can spot a small peak when the automatic valve opens. Increase pulse time as needed. | |||
* Cannot open lid upon venting: | |||
** Chamber pressure still below atmosphere. Confirm pressure reading in software. If pressure is below 5e2 Torr, check whether the nitrogen bottle valve is open. | |||
** Rubber O-ring can get stuck to the lid. Gently but firmly lift the lid. Reseat the O-ring if needed. | |||
Revision as of 15:42, 13 February 2019
 | |
| Essentials | |
|---|---|
| Full name | Savannah S100 (gen. 1) |
| Manufacturer | Cambridge NanoTech (Veeco) |
| Description | Atomic layer deposition system |
| Location | Cleanrooms 1 & 2 |
| Responsibility | |
| Primary | Karolis |
| Secondary | Shiv |
Available processes
| Deposited material | Precursor | ALD1 | ALD2 | Ref. |
|---|---|---|---|---|
| Hafnium oxide (HfOx, HfO2) | TDMAH tetrakis(dimethylamino)hafnium [(CH3)2N]4Hf  |
Yes | Yes | [1] |
| Aluminum oxide (AlOx, Al2O3) | TMA trimethylaluminum (CH3)3Al  |
Yes | No | [2] |
Standard operating procedure
- Check nitrogen bottle pressure. Main bottle pressure should be at least 5 bar, line pressure roughly 1 bar.
- If line pressure is outside of 1-2 bar range, carefully adjust the regulator valve.
- Make sure the valve on top of the nitrogen bottle is closed.
- Make sure the valves of all precursors inside the ALD machine are closed.
- ALD1 only: run recipe Default_cleaning to pump out any residual gas in the gas lines.
- Open valve on top of the nitrogen bottle.
- With flow set to 0 the actual flow can be between 0-1 sccm.
- Press the big round VENT button.
- Open the metal lid.
- Put your sample inside, roughly in the center, away from the gas inlet and outlet.
- Check whether the rubber O-ring is properly seated.
- Close the metal lid.
- Press the big round PUMP button.
- Pressure with flow set to 0: ~5e-2 Torr or lower.
- Place the metal cage on top of the tool.
- Open relevant precursor valves.
- Run your recipe.
- Pressure with flow present: low e-1 Torr.
- Pulse pressure: in the order of 1e0 Torr. Both precursors should show similar pulse peak pressure.
- ALD1 pulse lengths: H2O ~0.5 s, HfOx TDMAH 0.2 s, AlOx TMA 0.02 s.
- ALD2 pulse lengths: H2O ~0.02 s, HfOx TDMAH 0.2-0.5 s.
- Close precursor valves.
- Press the big round VENT button.
- Place the metal cage on the side of the tool.
- Take out your sample. Check the rubber o-ring.
- Press the big round PUMP button.
- Close the nitrogen bottle valve.
- Run recipe Default_heater_set.
Technical notes
- Recipe file location
- ALD1: C:\Savannah\Users\Standard\
- ALD2: C:\Cambridge Nanotech\Recipes\Standard\
- Log file location
- ALD1: C:\ALD data. Includes pressure data, screenshot at termination.
- ALD2: C:\Cambridge Nanotech\Logfile\. Includes pressure and heater temperature data, screenshot at termination, software event logs.
Troubleshooting
- Pressure reading obviously wrong (above 1e3 Torr or below 1e-4 Torr):
- Pressure gauge failure. Unplug the network cable from the small square pressure gauge beneath the chamber and plug it back in. The pressure reading should return to expected values.
- No peak visible during precursor pulse:
- Precursor valves closed. Make sure the relevant precursor valves are open. Consult the labels on the inside of the door.
- Pulse time too short. Select the lowest plotting interval and check whether you can spot a small peak when the automatic valve opens. Increase pulse time as needed.
- Cannot open lid upon venting:
- Chamber pressure still below atmosphere. Confirm pressure reading in software. If pressure is below 5e2 Torr, check whether the nitrogen bottle valve is open.
- Rubber O-ring can get stuck to the lid. Gently but firmly lift the lid. Reseat the O-ring if needed.