Diener plasma asher: Difference between revisions
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|description = Plasma cleaning/etching system | |description = Plasma cleaning/etching system | ||
|location = Cleanroom 1 | |location = Cleanroom 1 | ||
|primary = | |primary = Nader | ||
|secondary = | |secondary = Karolis | ||
}} | }} | ||
Revision as of 16:15, 12 February 2019
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 |
| Responsibility | |
| Primary | Nader |
| Secondary | Karolis |