Doses: Difference between revisions
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==InP== | ==InP== | ||
A4.5: | A4.5: 550 uC/cm2 Uniform clearing Beamer base dose/60s MIBK:IPA dev/10s IPA | ||
==InAs== | ==InAs== | ||
Revision as of 12:03, 1 May 2018
125 kV
GaAs
A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA
InP
A4.5: 700 uC/cm2 Uniform clearing Beamer base dose/60s MIBK:IPA dev/10s IPA
InAs
Si
CSAR 9: 430 uC/cm2 optimal contrast
A4: 1000 uC/cm2
A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested)
100 kV
GaAs
A6: --- uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA
InP
A4.5: 550 uC/cm2 Uniform clearing Beamer base dose/60s MIBK:IPA dev/10s IPA
InAs
Si
CSAR 9: 400 uC/cm2 optimal contrast/ 30s O-Xylene/5s conc. MIBK/IPA
A4: 800 uC/cm2/40s MIBK:IPA dev./10s IPA
A6: 1000 uC/cm2/60s MIBK:IPA dev./10s IPA