Doses: Difference between revisions
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Created page with "125 kV GaAs A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA" |
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125 kV | == 125 kV == | ||
=GaAs= | |||
A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA | |||
=InP= | |||
=InAs= | |||
A6: | =Si= | ||
CSAR 9: 430 uC/cm2 optimal contrast | |||
A4: 1000 uC/cm2 | |||
A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested) | |||
Revision as of 11:45, 1 May 2018
125 kV
GaAs
A6: 742 uC/cm2 Uniform clearing Beamer base dose/60s dev MIBK dev/10s IPA
InP
InAs
Si
CSAR 9: 430 uC/cm2 optimal contrast A4: 1000 uC/cm2 A6: 1200 uC/cm2 (or 1000 uC/cm2 with longer development? To be tested)