Resists: Difference between revisions
Jump to navigation
Jump to search
mNo edit summary |
added links to data sheets |
||
| Line 1: | Line 1: | ||
== Photoresists == | == Photoresists == | ||
* [[AZ 1505]] | * [[AZ 1505]] ([https://www.microchemicals.com/micro/tds_az_1500_series.pdf technical data sheet]) | ||
* AZ 4500 series | * AZ 4500 series ([https://www.microchemicals.com/micro/tds_az_4500_series.pdf data sheet]) | ||
* AZ 5214 E | * AZ 5214 E ([https://www.microchemicals.com/micro/tds_az_5214e_photoresist.pdf data sheet]) | ||
* AZ nLOF 2000 | * AZ nLOF 2000 ([https://www.microchemicals.com/micro/tds_az_nlof2000_series.pdf data sheet]) | ||
* MR ma-N 400 & 1400 | * MR ma-N 400 & 1400 ([https://www.microresist.de/en/?jet_download=2437 data sheet]) | ||
* [[AR-N 7520]] NEW (high sensitivity) | * [[AR-N 7520]] NEW (high sensitivity) ([https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-N7520new_english_Allresist_product-information.pdf data sheet]) | ||
* [[AR-N 7520]] ORIG. (low sensitivity) | * [[AR-N 7520]] ORIG. (low sensitivity) | ||
* SU-8 ([https://kayakuam.com/wp-content/uploads/2020/09/KAM-SU-8-2-25-Datasheet-9.3.20-final.pdf data sheet]) | |||
== Electron beam resists == | == Electron beam resists == | ||
* PMMA | * PMMA A-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | ||
* AR-P 6200 (CSAR | * AR-P 6200 (CSAR) ([https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-P6200_CSAR62english_Allresist_product-information.pdf data sheet]) | ||
* ZEP 520A | * ZEP 520A | ||
* MMA copolymer | * MMA copolymer EL-series ([https://kayakuam.com/wp-content/uploads/2021/07/KAM-PMMA-Datasheet-4.12.21-final.pdf data sheet]) | ||
Revision as of 13:59, 2 February 2022
Photoresists
- AZ 1505 (technical data sheet)
- AZ 4500 series (data sheet)
- AZ 5214 E (data sheet)
- AZ nLOF 2000 (data sheet)
- MR ma-N 400 & 1400 (data sheet)
- AR-N 7520 NEW (high sensitivity) (data sheet)
- AR-N 7520 ORIG. (low sensitivity)
- SU-8 (data sheet)
Electron beam resists
- PMMA A-series (data sheet)
- AR-P 6200 (CSAR) (data sheet)
- ZEP 520A
- MMA copolymer EL-series (data sheet)