Resists: Difference between revisions
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* AZ 5214 E | * AZ 5214 E | ||
* AZ nLOF 2000 | * AZ nLOF 2000 | ||
* | * MR ma-N 400 & 1400 | ||
* [[ | * [[AR-N 7520]] NEW (high sensitivity) | ||
* [[AR-N 7520]] ORIG. (low sensitivity) | |||
== Electron beam resists == | == Electron beam resists == | ||
* PMMA | |||
* AR-P 6200 (CSAR 62) | * AR-P 6200 (CSAR 62) | ||
* ZEP 520A | * ZEP 520A | ||
* MMA copolymer | * MMA copolymer | ||
* SU-8 | * SU-8 | ||