Resists: Difference between revisions

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* AZ nLOF 2000
* AZ nLOF 2000
* MRT ma-N 400 & 1400
* MRT ma-N 400 & 1400
* AR-N 7520.011 new
* [[Arn7520]] new


== Electron beam resists ==
== Electron beam resists ==

Revision as of 10:26, 12 December 2017

Photoresists

  • AZ 1505
  • AZ 4500 series
  • AZ 5214 E
  • AZ nLOF 2000
  • MRT ma-N 400 & 1400
  • Arn7520 new

Electron beam resists

  • AR-P 6200 (CSAR 62)
  • ZEP 520A
  • PMMA
  • MMA copolymer
  • SU-8
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