Revision as of 13:27, 2 December 2016

Overview

The e-gun evaporator, also known as Egon, is a homegrown electron beam physical vapor deposition system.

Prerequisites:

Then:

Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or or (over range)
Remove the sample holder

Mount the sample on the holder and secure the holder in the top position
Close the vent valve
Close the roughing pump valve (RV). A warning signal for close RV starts
Open the sample valve (SV). Watch the LL pressure on the gauge.
When the LL pressure is < 8×10^-2 torr, open RV again
When the LL pressure is < 5×10^-2 torr, close SV. Watch for a fast rise in the LL pressure! This is a sign of a leak.
Open GV before LL pressure rises to > 8×10^-2 torr
Gently lower the sample holder into the chamber

@@ Line 25: / Line 25: @@
 # Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or ''or'' (over range)
 # Remove the sample holder
+== Loading sample/pumping down the loadlock ==
+# Mount the sample on the holder and secure the holder in the top position
+# Close the vent valve
+# Close the roughing pump valve (RV). A warning signal for close RV starts
+# Open the sample valve (SV). Watch the LL pressure on the gauge.
+# When the LL pressure is < 8×10<sup>-2</sup> torr, open RV again
+# When the LL pressure is < 5×10<sup>-2</sup> torr, close SV. Watch for a fast rise in the LL pressure! This is a sign of a leak.
+# Open GV before LL pressure rises to > 8×10<sup>-2</sup> torr
+# '''Gently''' lower the sample holder into the chamber