E-Gun evaporator: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 11: | Line 11: | ||
|manual = [https://drive.google.com/file/d/0B-faAuxPBSyUcmxVZjRHd1lmYWs/view?usp=sharing Guide to Egun chamber] | |manual = [https://drive.google.com/file/d/0B-faAuxPBSyUcmxVZjRHd1lmYWs/view?usp=sharing Guide to Egun chamber] | ||
}} | }} | ||
= Overview = | |||
The e-gun evaporator, also known as [https://en.wikipedia.org/wiki/Egon_Olsen Egon], is a homegrown electron beam physical vapor deposition system. | |||
= Operating instructions = | |||
== Unloading sample/Venting loadlock == | |||
Prerequisites: | |||
# Sample holder must be in the top position | |||
# The gate valve (GV) '''must be closed''' | |||
# The sample valve (SV) to the roughing pump '''must be closed''' | |||
Then: | |||
# Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or ''or'' (over range) | |||
# Remove the sample holder | |||
Revision as of 13:24, 2 December 2016
Overview
The e-gun evaporator, also known as Egon, is a homegrown electron beam physical vapor deposition system.
Operating instructions
Unloading sample/Venting loadlock
Prerequisites:
- Sample holder must be in the top position
- The gate valve (GV) must be closed
- The sample valve (SV) to the roughing pump must be closed
Then:
- Open vent valve on loadlock (LL). The pressure gauge for the LL should now read about 760 Torr or or (over range)
- Remove the sample holder