Plassys Evaporator: Difference between revisions
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= Standard Operating Procedure= | = Standard Operating Procedure= | ||
==System pre-checks== | |||
== | <div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;"> | ||
= | * '''Is the oxygen alarm beeping?''' | ||
*: ''Leave the room immediately and notify the cleanroom staff'' | |||
* Log the loadlock and main chamber pressures in the Excel log sheet at the external computer. | |||
*: P<sub>LL</sub> ~ 1e-7 bar | |||
*: P<sub>main</sub> < 5e-8 bar | |||
* T<sub>cryo</sub> should be in the range 12-15 K | |||
* Verify that nobody has loaded a sample and that no user is logged on | |||
* Click on the <code>logged off</code> indication of the GUI and use your group's credentials to log in | * Click on the <code>logged off</code> indication of the GUI and use your group's credentials to log in | ||
</div> | |||
==Load | ==Loading your sample== | ||
<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;"> | |||
* On the <code>- LL state -</code> side of the user interface click <code>VENT</code> | |||
* Wait for the load lock to vent. | |||
*:''The venting is complete when you stop hearing the hissing sound of the N2 line'' | |||
* Wear gloves. Sleeves and hair net are also recommended. | |||
* Use the stepping stool to have better access to the loadlock | |||
*:'' Be careful with the ventilation unit above the tool'' | |||
* Open the loadlock lid | |||
* Use the dedicated screwdriver to loosen the three main screws | |||
* Rotate the holder to release it from the main stage. | |||
* Place the holder on a cleanroom wipe on the table | |||
* Close the LL lid | |||
* Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends. | |||
*: '''Keep the unused holders in the N2 desiccator''' | |||
* Align the holder pin with the pin in the chamber. This will help you with any angled evaporations. | |||
* Tighten the screws with the dedicated screwdriver and place it back in its holder. | |||
* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code> | |||
*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump. | |||
</div> | |||
==Run a process== | |||
<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;"> | |||
===Load recipe=== | |||
<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;"> | |||
While the loadlock is pumping down, you can prepare your recipe | While the loadlock is pumping down, you can prepare your recipe | ||
* Click on the '''Edit process''' icon | |||
* <code>File > Open recipe> ...</code> Choose from your group folde | |||
* Edit the main parameters such as time, thickness, and tilt | |||
* Save the recipe | |||
*: ''On the saved recipe name you automatically get the date added'' | |||
* Close the window | |||
</div> | |||
==Excecute | ===Excecute recipe=== | ||
* '''Are you doing evaporation? | <div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;"> | ||
* Click on the '''Run process''' icon | |||
* Load your recipe | |||
* Verify all your steps | |||
* Click <code>Execute</code> | |||
==== Are you doing evaporation?==== | |||
: ''Turn on the Carrera power supply'' | |||
==== '''Are you doing milling?==== | |||
: ''Turn on the Kaufman control unit'' | |||
: ''Open the valve of the argon bottle'' | |||
==== '''Are you doing oxidation?==== | |||
: ''Verify that the oxygen bottle valve is open'' | |||
==Monitor | </div> | ||
===Monitor the process=== | |||
<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;"> | |||
* '''Do not leave the system unattended''' | * '''Do not leave the system unattended''' | ||
* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages | * During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages | ||
* Keep the viewport shutter always closed | * Keep the viewport shutter always closed | ||
* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque) | * There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque) | ||
</div> | |||
</div> | |||
==Sample unloading== | ==Sample unloading== | ||
# Accept the ''Process complete'' pop-up message | <div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;"> | ||
* Accept the ''Process complete'' pop-up message | |||
* Turn off the Carrera power supply, Kaufman controller. | |||
* On the <code>- LL state -</code> side of the user interface click <code>VENT</code> | |||
* Wait for the load lock to vent. | |||
*:''The venting is complete when you stop hearing the hissing sound of the N2 line'' | |||
* Wear gloves. Sleeves and hairnet are also recommended. | |||
* Use the stepping stool to have better access to the loadlock | |||
*:'' Be careful with the ventilation unit above the tool'' | |||
* Open the loadlock lid | |||
* Use the dedicated screwdriver to loosen the three main screws | |||
* Rotate the holder to release it from the main stage. | |||
* Place the holder on a cleanroom wipe on the table | |||
* Close the LL lid | |||
* Remove your chip from the holder. | |||
* Wipe the holder with ethanol | |||
* Place the holder back into the loadlock. | |||
*: If you used a holder from your own group, then place your holder back into the desiccator and load the holder that was initially in the chamber. | |||
* Align the holder pin with the pin in the chamber. | |||
* Tighten the screws with the dedicated screwdriver and place it back in its holder. | |||
* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code> | |||
*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump. | |||
*: Verify that '''the load lock is pumping down''' | |||
# Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''. | * Go to <code>File</code> and '''Log off''' | ||
* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''. | |||
===Checkout list=== | |||
<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;"> | |||
* Verify that '''the loadlock is pumping down.''' | |||
* Verify that '''the Carrera power supply, Kaufman controller are turned off.''' | |||
* Verify that '''you are logged off'''. | |||
* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''. | |||
</div> | |||
</div> | |||
Latest revision as of 11:53, 8 September 2026
 | |
| Essentials | |
|---|---|
| Full name | MEB550S |
| Manufacturer | Plassys |
| Description | Evaporation system |
| Location | 1st floor lab (03.2.213) |
| Responsibility | |
| Primary | Harry |
| Secondary | Martin |
Page last updated: 8 Sep 2026
Overview
Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.
It also provides an ion gun for surface preparation and etching purposes.
The system has the capability of in-situ oxidation.
The sample stage can be cooled with LN2. currrently not available
Film Quality: Surface roughness - 1.6 nm for 100nm thick film. Scan area 2 um - AFM Analysis, June 2023
Currently loaded materials
| Crucible position | Material | Comment |
|---|---|---|
| 1 | Ti | Currently In Use |
| 2 | - | Empty |
| 3 | - | Empty |
| 4 | Al | NBI crucible |
| 5 | Al | NQCP crucible |
Substrates allowed
- Silicon and Sapphire only
- III/V substrates are not allowed in the chamber
Standard Operating Procedure
System pre-checks
- Is the oxygen alarm beeping?
- Leave the room immediately and notify the cleanroom staff
- Log the loadlock and main chamber pressures in the Excel log sheet at the external computer.
- PLL ~ 1e-7 bar
- Pmain < 5e-8 bar
- Tcryo should be in the range 12-15 K
- Verify that nobody has loaded a sample and that no user is logged on
- Click on the
logged offindication of the GUI and use your group's credentials to log in
Loading your sample
- On the
- LL state -side of the user interface clickVENT - Wait for the load lock to vent.
- The venting is complete when you stop hearing the hissing sound of the N2 line
- Wear gloves. Sleeves and hair net are also recommended.
- Use the stepping stool to have better access to the loadlock
- Be careful with the ventilation unit above the tool
- Open the loadlock lid
- Use the dedicated screwdriver to loosen the three main screws
- Rotate the holder to release it from the main stage.
- Place the holder on a cleanroom wipe on the table
- Close the LL lid
- Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
- Keep the unused holders in the N2 desiccator
- Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.
- Tighten the screws with the dedicated screwdriver and place it back in its holder.
- On the
- LL state -side of the user interface, clickPUMP- The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
Run a process
Load recipe
While the loadlock is pumping down, you can prepare your recipe
- Click on the Edit process icon
File > Open recipe> ...Choose from your group folde- Edit the main parameters such as time, thickness, and tilt
- Save the recipe
- On the saved recipe name you automatically get the date added
- Close the window
Excecute recipe
- Click on the Run process icon
- Load your recipe
- Verify all your steps
- Click
Execute
Are you doing evaporation?
- Turn on the Carrera power supply
Are you doing milling?
- Turn on the Kaufman control unit
- Open the valve of the argon bottle
Are you doing oxidation?
- Verify that the oxygen bottle valve is open
Monitor the process
- Do not leave the system unattended
- During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages
- Keep the viewport shutter always closed
- There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)
Sample unloading
- Accept the Process complete pop-up message
- Turn off the Carrera power supply, Kaufman controller.
- On the
- LL state -side of the user interface clickVENT - Wait for the load lock to vent.
- The venting is complete when you stop hearing the hissing sound of the N2 line
- Wear gloves. Sleeves and hairnet are also recommended.
- Use the stepping stool to have better access to the loadlock
- Be careful with the ventilation unit above the tool
- Open the loadlock lid
- Use the dedicated screwdriver to loosen the three main screws
- Rotate the holder to release it from the main stage.
- Place the holder on a cleanroom wipe on the table
- Close the LL lid
- Remove your chip from the holder.
- Wipe the holder with ethanol
- Place the holder back into the loadlock.
- If you used a holder from your own group, then place your holder back into the desiccator and load the holder that was initially in the chamber.
- Align the holder pin with the pin in the chamber.
- Tighten the screws with the dedicated screwdriver and place it back in its holder.
- On the
- LL state -side of the user interface, clickPUMP- The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
- Verify that the load lock is pumping down
- Go to
Fileand Log off - Verify that the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind.
Checkout list
- Verify that the loadlock is pumping down.
- Verify that the Carrera power supply, Kaufman controller are turned off.
- Verify that you are logged off.
- Verify that the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind.