Plassys Evaporator: Difference between revisions

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|secondary = Martin
|secondary = Martin
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''Page last updated: 11 Nov 2025''
''Page last updated: 8 Sep 2026''
= Overview =
= Overview =
Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.
Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.
Line 43: Line 43:


= Standard Operating Procedure=
= Standard Operating Procedure=
This is the standard operating procedure for the Plassys evaporator at the process lab on the second floor.
==System pre-checks==
==Pre-checks and log in==
<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
===Pre-checks===
* '''Is the oxygen alarm beeping?'''
# '''Is the oxygen alarm beeping?'''
*: ''Leave the room immediately and notify the cleanroom staff''
#: ''Leave the room immediately and notify the cleanroom staff''
* Log the loadlock and main chamber pressures in the Excel log sheet at the external computer.
# Log the loadlock and main chamber pressures in the Excel log sheet at the external computer.
*: P<sub>LL</sub> ~ 1e-7 bar
#* P<sub>LL</sub> ~ 1e-7 bar
*: P<sub>main</sub> < 5e-8 bar
#* P<sub>main</sub> < 5e-8 bar
* T<sub>cryo</sub> should be in the range 12-15 K
# Verify that the turbopump and the cryopump are both running (check main software interface)
* Verify that nobody has loaded a sample and that no user is logged on
#* Turbo should be running on 100% speed
#* T<sub>cryo</sub> should be in the range 12-15 K
# Verify that nobody has loaded a sample and that no user is logged on
===Log in===
* Click on the <code>logged off</code> indication of the GUI and use your group's credentials to log in
* Click on the <code>logged off</code> indication of the GUI and use your group's credentials to log in
==Sample loading==
</div>
# On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
# Wait for the load lock to vent.
#:''The venting is complete when you stop hearing the hissing sound of the N2 line''
# Wear gloves. Sleeves and hair net are also recommended.
# Use the stepping stool to have better access to the loadlock
#:'' Be careful with the ventilation unit above the tool''
# Open the loadlock lid
# Use the dedicated screwdriver to loosen the three main screws
# Rotate the holder to release it from the main stage.
# Place the holder on a cleanroom wipe on the table
# Close the LL lid
# Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
#: '''Keep the unused holders in the N2 desiccator'''
# Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.
# Tighten the screws with the dedicated screwdriver and place it back in its holder.
# On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
#: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.


==Load your recipe==
==Loading your sample==
<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
* On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
* Wait for the load lock to vent.
*:''The venting is complete when you stop hearing the hissing sound of the N2 line''
* Wear gloves. Sleeves and hair net are also recommended.
* Use the stepping stool to have better access to the loadlock
*:'' Be careful with the ventilation unit above the tool''
* Open the loadlock lid
* Use the dedicated screwdriver to loosen the three main screws
* Rotate the holder to release it from the main stage.
* Place the holder on a cleanroom wipe on the table
* Close the LL lid
* Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
*: '''Keep the unused holders in the N2 desiccator'''
* Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.
* Tighten the screws with the dedicated screwdriver and place it back in its holder.
* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
</div>
 
==Run a process==
<div style="background-color: #d1ecf1; border: 1px solid #17a2b8; padding: 10px; border-radius: 5px;">
===Load recipe===
<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">
While the loadlock is pumping down, you can prepare your recipe
While the loadlock is pumping down, you can prepare your recipe
# Click on the '''Edit process''' icon
* Click on the '''Edit process''' icon
# <code>File > Open recipe> ...</code> Choose from your group folde
* <code>File > Open recipe> ...</code> Choose from your group folde
# Edit the main parameters such as time, thickness, and  tilt
* Edit the main parameters such as time, thickness, and  tilt
# Save the recipe
* Save the recipe
#: ''On the saved recipe name you automatically get the date added''
*: ''On the saved recipe name you automatically get the date added''
# Close the window
* Close the window
 
</div>
==Excecute your recipe==
===Excecute recipe===
* '''Are you doing evaporation?'''
<div style="background-color: #17a2b8; border: 1px solid #1491A5; padding: 10px; border-radius: 5px;">
*: ''Turn on the Carrera power supply''
* Click on the '''Run process''' icon
* '''Are you doing milling?'''
* Load your recipe
*: ''Turn on the Kaufman control unit and open the valve of the argon bottle''
* Verify all your steps
* '''Are you doing oxidation?'''
* Click <code>Execute</code>
*: ''Verify that the oxygen bottle valve is open''
==== Are you doing evaporation?====
 
: ''Turn on the Carrera power supply''
# Click on the '''Run process''' icon
==== '''Are you doing milling?====
# Load your recipe
: ''Turn on the Kaufman control unit''
# Verify all your steps
: ''Open the valve of the argon bottle''
#Click <code>Execute</code>
==== '''Are you doing oxidation?====
 
: ''Verify that the oxygen bottle valve is open''
==Monitor your process==
</div>
===Monitor the process===
<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
* '''Do not leave the system unattended'''
* '''Do not leave the system unattended'''
* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages
* During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages
* Keep the viewport shutter always closed  
* Keep the viewport shutter always closed  
* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)
* There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)
</div>
</div>


==Sample unloading==
==Sample unloading==
# Accept the ''Process complete'' pop-up message
<div style="background-color: #fff3cd; border: 1px solid #ffc107; padding: 10px; border-radius: 5px;">
# Turn off the Carrera power supply, Kaufman controller, and close the valces of the gas bottles
* Accept the ''Process complete'' pop-up message
# On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
* Turn off the Carrera power supply, Kaufman controller.
# Wait for the load lock to vent.
* On the <code>- LL state -</code> side of the user interface click <code>VENT</code>
#:''The venting is complete when you stop hearing the hissing sound of the N2 line''
* Wait for the load lock to vent.
# Wear gloves. Sleeves and hair net are also recommended.
*:''The venting is complete when you stop hearing the hissing sound of the N2 line''
# Use the stepping stool to have better access to the loadlock
* Wear gloves. Sleeves and hairnet are also recommended.
#:'' Be careful with the ventilation unit above the tool''
* Use the stepping stool to have better access to the loadlock
# Open the loadlock lid
*:'' Be careful with the ventilation unit above the tool''
# Use the dedicated screwdriver to loosen the three main screws
* Open the loadlock lid
# Rotate the holder to release it from the main stage.
* Use the dedicated screwdriver to loosen the three main screws
# Place the holder on a cleanroom wipe on the table
* Rotate the holder to release it from the main stage.
# Close the LL lid
* Place the holder on a cleanroom wipe on the table
# Remove your chip from the holder.
* Close the LL lid
# Wipe the holder with ethanol
* Remove your chip from the holder.
# Place the holder back into the loadlock.
* Wipe the holder with ethanol
#: If you used a holder from your own group, then place your holder back into the descicator and load the holder that was initially in the chamber.
* Place the holder back into the loadlock.
# Align the holder pin with the pin in the chamber.
*: If you used a holder from your own group, then place your holder back into the desiccator and load the holder that was initially in the chamber.
# Tighten the screws with the dedicated screwdriver and place it back in its holder.
* Align the holder pin with the pin in the chamber.
# On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
* Tighten the screws with the dedicated screwdriver and place it back in its holder.
#: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.  
* On the <code>- LL state -</code> side of the user interface, click <code>PUMP</code>
#: '''Verify that the load lock is pumping down'''
*: The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.  
# Go to <code>File</code> and '''Log off'''
*: Verify that '''the load lock is pumping down'''
# Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.
* Go to <code>File</code> and '''Log off'''
* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.
 
===Checkout list===
<div style="background-color: #f8d7da; border: 1px solid #f5c6cb; padding: 10px; border-radius: 5px;">
* Verify that '''the loadlock is pumping down.'''
* Verify that '''the Carrera power supply, Kaufman controller are turned off.'''
* Verify that '''you are logged off'''.
* Verify that '''the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind'''.
</div>
</div>

Latest revision as of 11:53, 8 September 2026

Plassys Evaporator
Picture of Plassys Evaporator text
Essentials
Full nameMEB550S
ManufacturerPlassys
DescriptionEvaporation system
Location1st floor lab (03.2.213)
Responsibility
PrimaryHarry
SecondaryMartin

Page last updated: 8 Sep 2026

Overview

Physical vapour deposition tool of aluminium via e-beam evaporation for Josephson junction fabrication.

It also provides an ion gun for surface preparation and etching purposes.

The system has the capability of in-situ oxidation.

The sample stage can be cooled with LN2. currrently not available

Film Quality: Surface roughness - 1.6 nm for 100nm thick film. Scan area 2 um - AFM Analysis, June 2023

Currently loaded materials

Crucible position Material Comment
1 Ti Currently In Use
2 - Empty
3 - Empty
4 Al NBI crucible
5 Al NQCP crucible

Substrates allowed

  • Silicon and Sapphire only
  • III/V substrates are not allowed in the chamber

Standard Operating Procedure

System pre-checks

  • Is the oxygen alarm beeping?
    Leave the room immediately and notify the cleanroom staff
  • Log the loadlock and main chamber pressures in the Excel log sheet at the external computer.
    PLL ~ 1e-7 bar
    Pmain < 5e-8 bar
  • Tcryo should be in the range 12-15 K
  • Verify that nobody has loaded a sample and that no user is logged on
  • Click on the logged off indication of the GUI and use your group's credentials to log in

Loading your sample

  • On the - LL state - side of the user interface click VENT
  • Wait for the load lock to vent.
    The venting is complete when you stop hearing the hissing sound of the N2 line
  • Wear gloves. Sleeves and hair net are also recommended.
  • Use the stepping stool to have better access to the loadlock
    Be careful with the ventilation unit above the tool
  • Open the loadlock lid
  • Use the dedicated screwdriver to loosen the three main screws
  • Rotate the holder to release it from the main stage.
  • Place the holder on a cleanroom wipe on the table
  • Close the LL lid
  • Clamp your substrate to the holder. There are many available holders. Use the one that your group recommends.
    Keep the unused holders in the N2 desiccator
  • Align the holder pin with the pin in the chamber. This will help you with any angled evaporations.
  • Tighten the screws with the dedicated screwdriver and place it back in its holder.
  • On the - LL state - side of the user interface, click PUMP
    The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.

Run a process

Load recipe

While the loadlock is pumping down, you can prepare your recipe

  • Click on the Edit process icon
  • File > Open recipe> ... Choose from your group folde
  • Edit the main parameters such as time, thickness, and tilt
  • Save the recipe
    On the saved recipe name you automatically get the date added
  • Close the window

Excecute recipe

  • Click on the Run process icon
  • Load your recipe
  • Verify all your steps
  • Click Execute

Are you doing evaporation?

Turn on the Carrera power supply

Are you doing milling?

Turn on the Kaufman control unit
Open the valve of the argon bottle

Are you doing oxidation?

Verify that the oxygen bottle valve is open

Monitor the process

  • Do not leave the system unattended
  • During your process, you will be asked multiple times to check that the system is in the correct state and you need to be present to aknowledge these messages
  • Keep the viewport shutter always closed
  • There is a polariser filter on the viewport that you can use when the crucible is bright. See the indications about the positioning of the polariser (transparent vs opaque)

Sample unloading

  • Accept the Process complete pop-up message
  • Turn off the Carrera power supply, Kaufman controller.
  • On the - LL state - side of the user interface click VENT
  • Wait for the load lock to vent.
    The venting is complete when you stop hearing the hissing sound of the N2 line
  • Wear gloves. Sleeves and hairnet are also recommended.
  • Use the stepping stool to have better access to the loadlock
    Be careful with the ventilation unit above the tool
  • Open the loadlock lid
  • Use the dedicated screwdriver to loosen the three main screws
  • Rotate the holder to release it from the main stage.
  • Place the holder on a cleanroom wipe on the table
  • Close the LL lid
  • Remove your chip from the holder.
  • Wipe the holder with ethanol
  • Place the holder back into the loadlock.
    If you used a holder from your own group, then place your holder back into the desiccator and load the holder that was initially in the chamber.
  • Align the holder pin with the pin in the chamber.
  • Tighten the screws with the dedicated screwdriver and place it back in its holder.
  • On the - LL state - side of the user interface, click PUMP
    The loadock will start pumping first with the scroll pump (up to 1e-1 bar) and then with the turbopump.
    Verify that the load lock is pumping down
  • Go to File and Log off
  • Verify that the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind.

Checkout list

  • Verify that the loadlock is pumping down.
  • Verify that the Carrera power supply, Kaufman controller are turned off.
  • Verify that you are logged off.
  • Verify that the surfaces are tidy, there are no excess wipes on the table and you left no samples or sample boxes behind.
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