Sensofar optical profiler: Difference between revisions

From cleanroom
Jump to navigation Jump to search
Chenglee (talk | contribs)
No edit summary
Chenglee (talk | contribs)
No edit summary
 
(2 intermediate revisions by the same user not shown)
Line 4: Line 4:
|website = https://www.sensofar.com/metrology/sneox/
|website = https://www.sensofar.com/metrology/sneox/
|company = Sensofar Metrology
|company = Sensofar Metrology
|description = Optical surface profiler
|description = Optical profiler
|location = Cleanroom 2
|location = Cleanroom 2
|primary = Nader
|primary = Nader
|secondary = Nikki
|secondary = Nikki
}}
}}
[[Category:Tools]]
[[Category:Characterization]]
Sensofar S Neox is a versatile, '''non-contact 3D optical profiler''' used for high-precision surface metrology. It combines confocal, interferometry and focus variation techniques to characterize a wide range of surface topology and materials, including roughness, flatness, step height and texture. Choosing the appropriate technique based on the sample's surface characteristics is essential for obtaining accurate and reliable results.
'''Confocal''': for high lateral resolution to very rough surfaces.
'''Interferometry''' (PSI/VSI/ePSI): for smooth to moderately rough surfaces and sub-nanometer height resolution.
'''Focus Variation''': for very rough or steep surfaces.
Compared with contact profilometry and AFM:
* Lower lateral resolution than AFM for nanoscale feature.
* Less suitable for measuring features smaller than the optical diffraction limit.
* Transparent and semi-transparent films may generate reflections from multiple interfaces, which can reduce measurement accuracy.
'''💡Questions?'''
For more information, kindly contact NBI-Cleanroom staff.

Latest revision as of 07:34, 10 July 2026

Sensofar optical profiler
Picture of Sensofar optical profiler text
Essentials
Full nameSensofar S neox
ManufacturerSensofar Metrology
DescriptionOptical profiler
LocationCleanroom 2
Responsibility
PrimaryNader
SecondaryNikki

Sensofar S Neox is a versatile, non-contact 3D optical profiler used for high-precision surface metrology. It combines confocal, interferometry and focus variation techniques to characterize a wide range of surface topology and materials, including roughness, flatness, step height and texture. Choosing the appropriate technique based on the sample's surface characteristics is essential for obtaining accurate and reliable results.

Confocal: for high lateral resolution to very rough surfaces. Interferometry (PSI/VSI/ePSI): for smooth to moderately rough surfaces and sub-nanometer height resolution. Focus Variation: for very rough or steep surfaces.

Compared with contact profilometry and AFM:

  • Lower lateral resolution than AFM for nanoscale feature.
  • Less suitable for measuring features smaller than the optical diffraction limit.
  • Transparent and semi-transparent films may generate reflections from multiple interfaces, which can reduce measurement accuracy.

💡Questions?

For more information, kindly contact NBI-Cleanroom staff.