Präzitherm hotplates: Difference between revisions
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{{Infobox tool | {{Infobox tool | ||
|image = Tool Hotplates.jpg | |image = Tool Hotplates.jpg | ||
|toolfullname = Präzitherm PZ14SR | |toolfullname = Präzitherm PZ14SR | ||
|website = | |website = https://www.gestigkeit.de/72/english/Products/Precision_hotplates.html | ||
|company = | |company = Harry Gestigkeit GmbH | ||
|description = | |description = Precision hotplate | ||
|location = | |location = Cleanroom 1 (03.2.209A)<br />Cleanroom 2 (03.2.203B) | ||
|primary = Nader | |primary = Nader | ||
|manual = [[Media:Hotplate_manual.pdf|Manual]] | |manual = [[Media:Hotplate_manual.pdf|Manual]] | ||
}} | }} | ||
Used to bake photo- and e-beam [[Resists|resist]] on substrates after [[Laurell spinners|spin coating]]. | |||
Should be left at 115°C and 185°C. | Should be left at 115°C and 185°C. | ||
Make sure there is no resist on the bottom of your chip ''before'' baking. | |||
[[Category:Tools]] | |||
Latest revision as of 19:44, 10 April 2022
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| Essentials | |
|---|---|
| Full name | Präzitherm PZ14SR |
| Manufacturer | Harry Gestigkeit GmbH |
| Description | Precision hotplate |
| Location | Cleanroom 1 (03.2.209A) Cleanroom 2 (03.2.203B) |
| Manual | Manual |
| Responsibility | |
| Primary | Nader |
Used to bake photo- and e-beam resist on substrates after spin coating.
Should be left at 115°C and 185°C.
Make sure there is no resist on the bottom of your chip before baking.