Plassys Evaporator: Difference between revisions

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== Overview ==
== Overview ==


Plassys system is for thin film deposition by electron beam evaporation. It also provides an ion gun for surface preparation and etching purposes.  
Physical vapor deposition tool of aluminum via e-beam evaporation for Josephson junction fabrication.
The system has the capability of in-situ oxidation .
It also provides an ion gun for surface preparation and etching purposes.  
The system has the capability of in-situ oxidation .  
 
Film Quality : Surface roughness - 1.6 nm for 100nm thick film ( scan area 2 um /AFM Analysis ( June 2023)


== Currently loaded materials ==
== Currently loaded materials ==
The materials currently available for deposition are :


{|
{|
Line 13: Line 14:
{| class="wikitable"
{| class="wikitable"
|-
|-
! AJA1
! Crucible position
! Material
! Material
! Liner
! Comment
|-
|-
| 1
| 1
| Al
| Ti
| Intermetallic
| Plassys ( currently In Use)
|-
|-
| 2
| 2
| Ti1
| Al
| Fabmate
| Plassys ( Material consumed)
|-
|-
| 3
| 3
| Au1
| Al
| Tungsten
| Melted. Currently In Use
|-
|-
| 4
| 4
| Au2
| Tungsten
|-
| 5
| Ti2
| Fabmate
|-
| 6
| SiO2
| FabMate
|-
| DC1
| W
| --
|-
| DC2
| NbTi
| --
|-
|}
|
<span style="display:inline-block; width: 20px;"></span>
|
{| class="wikitable"
|-
! AJA2
! Material
! Liner
|-
| 1
| Au
| Tungsten
|-
| 2
| Titanium
| FabMate
|-
| 3
| Al
| Al
| Intermetallic
| new pellets. Not melted
|-
| 4
| Pd
| intermetallic
|-
| 5
| Ge
| FabMate
|-
| 6
| Pt
| FabMate
|-
| DC1
| ReMo
| --
|-
| RF2
| NbTi
| --
|-
|}
|-
|}
|}
== Substrates allowed ==
Silicon and Sapphire only

Latest revision as of 09:16, 20 June 2023

Overview

Physical vapor deposition tool of aluminum via e-beam evaporation for Josephson junction fabrication. It also provides an ion gun for surface preparation and etching purposes. The system has the capability of in-situ oxidation .

Film Quality : Surface roughness - 1.6 nm for 100nm thick film ( scan area 2 um /AFM Analysis ( June 2023)

Currently loaded materials

Crucible position Material Comment
1 Ti Plassys ( currently In Use)
2 Al Plassys ( Material consumed)
3 Al Melted. Currently In Use
4 Al new pellets. Not melted

Substrates allowed

Silicon and Sapphire only

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