Design template for lithography training

Introduction

We recommend using a combination of the following tools for designing devices:

• Klayout or CleWin (only for Windows)
• Phidl (python-based)
• Copilot (great tool to boost your productivity)

There is a code you can use as a basis to build the design for your EBL trainings.

You can find them on N/SCI-NBI-Cleanroom/Elionix100 EXP files/general Training.

• CR_template_training.gds design with alrignment marks and vernier patterns (~27mins exposure time)
• design_template.ipynb
• layer1_training.ftxt BEAMER file for elionix 100keV with 500pA