Elionix F-125
 | |
| Essentials | |
|---|---|
| Full name | Elionix F125 |
| Manufacturer | ELIONIX INC. |
| Description | Electron beam lithography system |
| Location | 01.K03 |
| Responsibility | |
| Primary | Zhe |
| Secondary | Harry |
Elionix F125 is a 125 kV acceleration electron beam lithography tool.
Tool Specification
- Acceleration voltage 50,75,100,125 kV
- Minimum beam diameter - 1.8 nm
- Beam current - 100 pA to 100nA
- Field Size - Min 100 um Max 3000 um
- Minimum line width - 7nm
- Overlay accuracy - 20nm