Elionix F-125

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Revision as of 14:59, 10 November 2025 by Zhe (talk | contribs) (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")
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Elionix F-125
Picture of Elionix F-125 text
Essentials
Full nameElionix F125
ManufacturerELIONIX INC.
DescriptionElectron beam lithography system
Location01.K03
Responsibility
PrimaryZhe
SecondaryHarry

Elionix F125 is a 125 kV acceleration electron beam lithography tool.

Tool Specification

  • Acceleration voltage 50,75,100,125 kV
  • Minimum beam diameter - 1.8 nm
  • Beam current - 100 pA to 100nA
  • Field Size - Min 100 um Max 3000 um
  • Minimum line width - 7nm
  • Overlay accuracy - 20nm
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