Wafers

You can email cleanroom@nbi.ku.dk to request chips or wafers.

In the case that you want to use multiple wafers, you will have to purchase wafers via your own grant. You can store the wafers in the cleanroom as your own property. Please remember to label them clearly.

Silicon wafers

In the cleanroom we have available:

Bare Si

• Si(001) 1" wafers
• Si(001) 2" wafers
• Si(001) 4" wafers (boron doped)
• Si(111) 6" wafers (instrinsic)

Si with CVD SiOx

• Si(001) 2" wafers 50 nm SiOx
• Si(001) 2" wafers 200 nm SiOx
• Si(001) 4" wafers 200 nm SiOx
• Si(001) 2" wafers 500 nm SiOx

Chips

• Si(001) (boron doped) with Au plating on the backside 15x15mm2 for characterisation of ALD films with Hg prober
• Si(001) (boron doped) 10x10mm2
• Si(001) (boron doped) wth ~115 nm CVD SiOx for sputtering and milling tests

III/V wafers

• InAs(001) 2" wafers