BEAMER
Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module.
For any questions regarding Beamer use, please first refer to the manual: Help > Help Manual (F1). Elionix-specific documentation: Help > Formatter Notes > Elionix.
It thoroughly covers all modules, their use, some theory, as well as includes helpful examples.
On the developer website you can find useful tutorials and application notes.
The Beamer software package also includes TRACER which allows for PEC for user-defined substrates, and ProSEM for image analysis.
Quick-start guide
This is a quick guide to get started quickly. The process should be tailored to your specific needs. The full manual can be found in Help > Help Manual (F1).