BEAMER

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Revision as of 15:42, 10 February 2025 by Harry (talk | contribs) (Created page with "Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module. For any questions regarding Beamer use, please first refer to the manual: '''Help > Help Manual (F1).''' Elionix-specific documentation: '''Help > Formatter Notes > Elionix'''. It thoroughly covers all modules, their use, some theory, as well as includes helpful examples. On...")
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Beamer is a software package used to process design files (.dxf, .gds, etc.) and make them ready for e-beam lithography machines. Crucially, it includes a proximity error correction (PEC) module.

For any questions regarding Beamer use, please first refer to the manual: Help > Help Manual (F1). Elionix-specific documentation: Help > Formatter Notes > Elionix.

It thoroughly covers all modules, their use, some theory, as well as includes helpful examples.

On the developer website you can find useful tutorials and application notes.

The Beamer software package also includes TRACER which allows for PEC for user-defined substrates, and ProSEM for image analysis.

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