Tergeo plasma asher
 | |
| Essentials | |
|---|---|
| Full name | Tergeo Plasma Cleaner |
| Manufacturer | PIE Scientific |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 2 |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
Quick-start guide
Video on how to operate the Tergeo Plasma Asher:
Click here to watch the video on YouTube
Load your sample
- Turn the lid counter-clockwise to remove it. Place it outside-up on a cleanroom wipe.
- Slide out quartz plate.
- Put your sample in the center between the marks.
- Slide the plate in and align it to the quartz cylinder.
- Put the lid back.
- Align the pins horizontally and rotate clockwise.
Execute a cleaning recipe
- On the touchscreen, using the stylus, press
Recipes. - Choose a desired plasma time.
Load RecipeRun Recipe- Wait for recipe to complete and the system to indicate that the chamber has been vented.
Unload your sample
- Remove the lid and place it on a cleanroom wipe.
- Slide out plate.
- Remove your sample.
- Slide the plate in.
- Put the lid back.
- Check on the screen that the pump is off (grey).
- If it is on (red), press to turn off.
- Done!