Etching

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https://transene.com/etch-compatibility/ Data comparing different bottles of transene type D: Etching on Si, InAs (001), and GaAs(001)

Etch rate with MIF321

The Al/SiO2 chips are developed in MIF321 for 50 sec, before etching.

Time [seconds]	0	3	6	9	12	15
Δh [nm]	10	25	35	40	50	60

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