Alpha-SE ellipsometer

Alpha-SE ellipsometer

Essentials
Full name	J.A. Woollam alpha-SE Ellipsometer
Manufacturer	J.A. Woollam
Description	Ellipsometer
Location	2nd floor lab (03.2.213)
Responsibility
Primary	Karolis

Quick-start guide

Video on how to operate the alpha-SE Ellipsometer:

Click here to watch the video on YouTube

1. Prepare for measurement:
   • Turn on using the green button on the top left of the tool.
   • Turn on the small orange pump behind the ellipsometer.
   • Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered.
   • Flip the Sample Vacuum switch on the front right of the tool.
2. On the PC, open the Complete EASE software:
   • Mode: Standard
   • Angles: 65°, 70°, 75°
   • Model: choose from list
   • Save Data after Measurement: user choice
   • Measure
3. Perform the measurement by following the prompts in the software:
   • Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot.
   • Repeat for the other side.
   • OK
   • Wait until the first part of the measurement finishes.
   • Repeat for all requested angles.
4. Read out film thickness value, uncertainty, mean squared error (MSE).
5. Finish up:
   • Switch off vacuum
   • Unload sample
   • Turn off pump
   • Turn off tool
6. Done!