JEOL 7800F

The JEOL 7800F SEM is located in the basement in the room K08. The tool has a primary and a supporting Caar - Petur and Nader, respectively. The SEM is equipped with the following detectors:

• an Inlens detector, referred to as the UED (Upper electron detector)
• an SE2 detector, referred to as the LED (Lower electron detector)
• a back scattered electron detector, BSED
• an EDS (Energy dispersion X-ray detector)