Elionix F-125: Difference between revisions
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Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma..." |
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{{Infobox tool | {{Infobox tool | ||
|image = | |image = F125.jpg | ||
|toolfullname = Elionix F125 | |toolfullname = Elionix F125 | ||
|website = http://www.elionix.co.jp/english/ | |website = http://www.elionix.co.jp/english/ | ||
Latest revision as of 15:08, 10 November 2025
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| Essentials | |
|---|---|
| Full name | Elionix F125 |
| Manufacturer | ELIONIX INC. |
| Description | Electron beam lithography system |
| Location | 01.K03 |
| Responsibility | |
| Primary | Zhe |
| Secondary | Harry |
Elionix F125 is a 125 kV acceleration electron beam lithography tool.
Tool Specification
- Acceleration voltage 50,75,100,125 kV
- Minimum beam diameter - 1.8 nm
- Beam current - 100 pA to 100nA
- Field Size - Min 100 um Max 3000 um
- Minimum line width - 7nm
- Overlay accuracy - 20nm