Dicing saw: Difference between revisions
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=Tool specifications= | =Tool specifications= | ||
The wafer saw is used for dicing '''Si''' and '''sapphire''' wafers. For dicing of III/Vs refer to [[Automatic Loomis scriber]] | |||
The wafer saw is used for dicing Si and sapphire wafers | |||
==Si dicing components== | ==Si dicing components== | ||
Revision as of 16:13, 2 December 2024
 | |
| Essentials | |
|---|---|
| Full name | DISCO DAD3221 |
| Manufacturer | DISCO |
| Description | Automatic dicing saw |
| Location | 1st floor (03.1.109) |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
Other tools at the NBI cleanroom for wafer processing:
This tool is operated only by the cleanroom staff and superuser. For any inquiries for dicing please write to cleanroom@nbi.ku.dk.
Tool specifications
The wafer saw is used for dicing Si and sapphire wafers. For dicing of III/Vs refer to Automatic Loomis scriber
Si dicing components
Blade Lot ID: ZH5-SD2000-N1-70
Tape:
Blade parameters
Spindle revolution: 30000 per minute
Sapphire dicing components
Blade Tape Blade parameters