JEOL 7800F: Difference between revisions
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The JEOL 7800F SEM is located in the basement in the room K08. The tool has a primary and a supporting Caar - Petur and Nader, respectively. The SEM is equipped with the following detectors: | |||
* an Inlens detector, referred to as the UED (Upper electron detector) | |||
* an SE2 detector, referred to as the LED (Lower electron detector) | |||
* a back scattered electron detector, BSED | |||
* an EDS (Energy dispersion X-ray detector) |
Revision as of 09:21, 30 November 2015
The JEOL 7800F SEM is located in the basement in the room K08. The tool has a primary and a supporting Caar - Petur and Nader, respectively. The SEM is equipped with the following detectors:
- an Inlens detector, referred to as the UED (Upper electron detector)
- an SE2 detector, referred to as the LED (Lower electron detector)
- a back scattered electron detector, BSED
- an EDS (Energy dispersion X-ray detector)