Tergeo plasma asher

Tergeo plasma asher

Essentials
Full name	Tergeo Plasma Cleaner
Manufacturer	PIE Scientific
Description	Plasma cleaning/etching system
Location	Cleanroom 2
Manual	Manufacturer quick start guide
Responsibility
Primary	Nader
Secondary	Martin

Quick-start guide

Video on how to operate the Tergeo Plasma Asher:

Click here to watch the video on YouTube

Load your sample

1. Turn the lid counter-clockwise to remove it. Place it outside-up on a cleanroom wipe.
2. Slide out quartz plate.
3. Put your sample in the center between the marks.
4. Slide the plate in and align it to the quartz cylinder.
5. Put the lid back.
   • Align the pins horizontally and rotate clockwise.

Execute a cleaning recipe

1. On the touchscreen, using the stylus, press Recipes.
2. Choose a desired plasma time.
3. Load Recipe
4. Run Recipe
5. Wait for recipe to complete and the system to indicate that the chamber has been vented.

Unload your sample

1. Remove the lid and place it on a cleanroom wipe.
2. Slide out plate.
3. Remove your sample.
4. Slide the plate in.
5. Put the lid back.
6. Check on the screen that the pump is off (grey).
   • If it is on (red), press to turn off.
7. Done!