Alpha-SE ellipsometer: Difference between revisions

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== Quick-start guide ==


Video on how to operate the alpha-SE Ellipsometer:
Video on how to operate the alpha-SE Ellipsometer:
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[[File:Ellipsometer.mp4|500px]]
[[File:Ellipsometer.mp4|500px]]


* [https://youtu.be/8NP7sFV3vzo Click here to watch the video on YouTube]
[https://youtu.be/8NP7sFV3vzo Click here to watch the video on YouTube]
 
# Prepare for measurement:
#* Turn on using the green button on the top left of the tool.
#* Turn on the small orange pump behind the ellipsometer.
#* Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered.
#* Flip the ''Sample Vacuum'' switch on the front right of the tool.
# On the PC, open the ''Complete EASE'' software:
#* Mode: Standard
#* Angles: 65°, 70°, 75°
#* Model: choose from list
#* Save Data after Measurement: user choice
#* <code>Measure</code>
# Perform the measurement by following the prompts in the software:
#* Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot.
#* Repeat for the other side.
#* <code>OK</code>
#* Wait until the first part of the measurement finishes.
#* Repeat for all requested angles.
# Read out film thickness value, uncertainty, mean squared error (MSE).
# Finish up:
#* Switch off vacuum
#* Unload sample
#* Turn off pump
#* Turn off tool
# Done!


[[Category:Tools]]
[[Category:Tools]]
[[Category:Characterization]]
[[Category:Characterization]]

Revision as of 20:14, 7 April 2022

Alpha-SE ellipsometer
Picture of Alpha-SE ellipsometer text
Essentials
Full nameJ.A. Woollam alpha-SE Ellipsometer
ManufacturerJ.A. Woollam
DescriptionEllipsometer
Location2nd floor lab (03.2.213)
Responsibility
PrimaryKarolis

Quick-start guide

Video on how to operate the alpha-SE Ellipsometer:

Click here to watch the video on YouTube

  1. Prepare for measurement:
    • Turn on using the green button on the top left of the tool.
    • Turn on the small orange pump behind the ellipsometer.
    • Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered.
    • Flip the Sample Vacuum switch on the front right of the tool.
  2. On the PC, open the Complete EASE software:
    • Mode: Standard
    • Angles: 65°, 70°, 75°
    • Model: choose from list
    • Save Data after Measurement: user choice
    • Measure
  3. Perform the measurement by following the prompts in the software:
    • Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot.
    • Repeat for the other side.
    • OK
    • Wait until the first part of the measurement finishes.
    • Repeat for all requested angles.
  4. Read out film thickness value, uncertainty, mean squared error (MSE).
  5. Finish up:
    • Switch off vacuum
    • Unload sample
    • Turn off pump
    • Turn off tool
  6. Done!