Alpha-SE ellipsometer: Difference between revisions
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m Karolis moved page Alpha-SE Ellipsometer to Alpha-SE ellipsometer: unify page name style |
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== Quick-start guide == | |||
Video on how to operate the alpha-SE Ellipsometer: | Video on how to operate the alpha-SE Ellipsometer: | ||
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[[File:Ellipsometer.mp4|500px]] | [[File:Ellipsometer.mp4|500px]] | ||
[https://youtu.be/8NP7sFV3vzo Click here to watch the video on YouTube] | |||
# Prepare for measurement: | |||
#* Turn on using the green button on the top left of the tool. | |||
#* Turn on the small orange pump behind the ellipsometer. | |||
#* Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered. | |||
#* Flip the ''Sample Vacuum'' switch on the front right of the tool. | |||
# On the PC, open the ''Complete EASE'' software: | |||
#* Mode: Standard | |||
#* Angles: 65°, 70°, 75° | |||
#* Model: choose from list | |||
#* Save Data after Measurement: user choice | |||
#* <code>Measure</code> | |||
# Perform the measurement by following the prompts in the software: | |||
#* Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot. | |||
#* Repeat for the other side. | |||
#* <code>OK</code> | |||
#* Wait until the first part of the measurement finishes. | |||
#* Repeat for all requested angles. | |||
# Read out film thickness value, uncertainty, mean squared error (MSE). | |||
# Finish up: | |||
#* Switch off vacuum | |||
#* Unload sample | |||
#* Turn off pump | |||
#* Turn off tool | |||
# Done! | |||
[[Category:Tools]] | [[Category:Tools]] | ||
[[Category:Characterization]] | [[Category:Characterization]] |
Revision as of 20:14, 7 April 2022
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Essentials | |
---|---|
Full name | J.A. Woollam alpha-SE Ellipsometer |
Manufacturer | J.A. Woollam |
Description | Ellipsometer |
Location | 2nd floor lab (03.2.213) |
Responsibility | |
Primary | Karolis |
Quick-start guide
Video on how to operate the alpha-SE Ellipsometer:
Click here to watch the video on YouTube
- Prepare for measurement:
- Turn on using the green button on the top left of the tool.
- Turn on the small orange pump behind the ellipsometer.
- Place your sample on the slit in the middle of the instrument. Make sure the two small holes are covered.
- Flip the Sample Vacuum switch on the front right of the tool.
- On the PC, open the Complete EASE software:
- Mode: Standard
- Angles: 65°, 70°, 75°
- Model: choose from list
- Save Data after Measurement: user choice
Measure
- Perform the measurement by following the prompts in the software:
- Pull out the spring lock and move the laser arm to the requested angle. Make sure the spring locks into the slot.
- Repeat for the other side.
OK
- Wait until the first part of the measurement finishes.
- Repeat for all requested angles.
- Read out film thickness value, uncertainty, mean squared error (MSE).
- Finish up:
- Switch off vacuum
- Unload sample
- Turn off pump
- Turn off tool
- Done!