Filled out chemical risk assessment forms: Difference between revisions

From cleanroom
Jump to navigation Jump to search
← Older editNewer edit →
No edit summary
No edit summary
Line 6: Line 6:


[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20III-V%20chemical%20etching%20-%20NBI.docx III-V etching]
[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20III-V%20chemical%20etching%20-%20NBI.docx III-V etching]


[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20Oxide%20Etching%20using%20HF%20-%20NBI.docx Etching oxides using hydrofluoric acid (HF)]
[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20Oxide%20Etching%20using%20HF%20-%20NBI.docx Etching oxides using hydrofluoric acid (HF)]


[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20Sulfur%20Surface%20Passivation%20-%20NBI.docx Sulfur surface passivation]
[https://groups.ku.dk/groups/d-4986/Document%20library/Risk%20assessments/APV%20-%20Sulfur%20Surface%20Passivation%20-%20NBI.docx Sulfur surface passivation]

Revision as of 12:59, 15 March 2022

ALD precursor exchange

Handling Buffered Tantaric Acid for Anodic Oxidation

Aluminum etching

III-V etching

Etching oxides using hydrofluoric acid (HF)

Sulfur surface passivation

Retrieved from "https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Filled_out_chemical_risk_assessment_forms&oldid=1961"